1) 內容- Contents: consisting of four major parts as
[A] Introduction to semiconductor engineering for short-wavelength application
[B] Crystal growth of semiconductors for short-wavelength application
Advanced industry production MOCVD systems (Emcore/Vecco, Aixtron, Thomas Swan);
High temperature (HT) sublimation growth of bulk SiC crystal;
HT chemical vapor deposition (CVD) of SiC heterospitaxy and homoepitaxy;
Epitaxy of GaN-based materials and quantum structures on Si, SiC and other substrates;
Pulse laser deposition and molecular beam epitaxy of GaN and SiC;
Various crystal growth tecniques on ZnO;
[C] Analysis Engineering for short-wavelength semiconductors
Polytype crystalline structures;
Stress and strain in layered structural materials;
Insitu epitaxy monitoring in MOCVD growth of short-wavelength semiconductors;
Interdisciplinary techniques for materials analysis on blue-UV semiconductors;
Optical analysis (Photoluminescence, Raman scattering, transmission/reflectance);
Structural analysis (high-resolution X-ray diffraction, electron microscopy);
Surface and Nuclear science/engineering analysis; Defects engineering.
[D] Nano-structural and device engineering in short-wavelength range
MOCVD growth of III-Nitrides Quantum dots; Growth of nano-structural SiC and ZnO;
Optical and structural properties of nano-structural short-wavelength semiconductors;
Processing techniques on nano-structural devices.
2) 教科書: No. References are provided in the course, and some are: Z C Feng/J H Zhao, Silicon Carbide Materials, Processing, and Devices (Taylor & Francis, 2003); Z C Feng, SiC Power Materials, Devices and Applications, Springer, 2004); J I Pankove/T D Moustakas, Gallium Nitride II (Academic, 1999).
3) 成績評量方式 : Homework (20%), mid-term exam (40%), final exam (40%)
4) 預修課程: No. (Notes – difference with the course Wide Gap Semiconductor Tech. (WGST): WGST uses Nakamura’s The Blue Laser Diode as textbook and is limited with mainly Nitrides and Nichia’s results. This course deals with much wide range of short-wavelength (or wide gap) semiconductor systems and more advanced growth/analysis engineering, emphasizing for industry.